Designing Nanostructures by Glancing Angle Deposition
نویسنده
چکیده
Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nanorod arrays with different shapes, nanospring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional capability of self-alignment. There is almost no limitation on materials that can be fabricated into desired nanostructures. In this presentation, we will discuss the current status of the glancing angle deposition technology, its potential applications, and its future challenges.
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